The semiconductor industry is rapidly evolving with continuous developments and innovations on the horizon. As semiconductor manufacturing becomes more advanced, cleanrooms must meet strict standards for material stability and measurement accuracy, which are achieved through precise temperature and humidity control. As cleanroom environments are sensitive to fluctuations in humidity and temperature, dedicated HVAC systems are vital.

Semiconductor manufacturing typically involves 2 types of manufacturing facilities, Fab Manufacturing and Fabless Manufacturing. Fab (short for fabrication) Manufacturing involves owning semiconductor fabrication plants (fabs) where chips are manufactured. Fabless Manufacturing has companies design semiconductor chips but outsource the fabrication process to a specialized foundry that produces integrated circuits.

HVAC systems in the semiconductor industry are vital for maintaining ISO Class 1 to Class 5 cleanroom classifications, using ULPA or HEPA filters for laminar airflow, or preventing particulate contamination. These systems ensure precise temperature control within ±0.1°C to avoid thermal expansion and contraction during critical processes like photolithography. HVAC also maintains humidity levels between 30-50% to prevent condensation and electrostatic discharge (ESD), safeguarding both equipment and personnel comfort.  

HVAC in Fab Manufacturing

Airflow and Pressure

Laminar flow ensures unidirectional airflow to minimize turbulence and particle spread. The positive pressure maintains pressure differentials (typically 15-25 Pa) to prevent contamination from adjacent areas.

Chemical and Gas Control

HVAC uses activated carbon or chemisorption filters to remove airborne molecular contaminants (AMCs). It also captures and exhausts hazardous fumes and volatile organic compounds (VOCs) at the source.

PCB (Printed Circuit Board) Assembly

During printed circuit board assembly (PCBA), HVAC ventilation equipment like mist collectors maintains indoor air quality, especially during the etching of circuit boards.

Vibration Isolation

HVAC systems incorporate dampening mechanisms to protect sensitive equipment from external vibrations and reduce noise interference through sound-absorbing materials and duct designs.

HVAC in Fabless Manufacturing

Data Centres and Server Rooms 

HVAC systems have a precise cooling system that prevents IT infrastructure from overheating. The hot aisle/cold aisle containment improves the cooling efficiency.

Laboratories and Testing Facilities

Consistent temperature and humidity levels prevent test variability in test data. HEPA filters maintain controlled environments for accurate testing and validation of semiconductor designs.

ESD Control

HVAC systems use ionizers to neutralize static in areas handling sensitive components, providing ESD-safe workbenches and flooring.

Ventilation and Chemical Safety

In testing labs, HVAC systems act as local exhaust systems, safely removing fumes, dust, and other contaminants, thus maintaining air quality and protecting employee health. 

XNRGY Climate Systems will be joining Innovatrix as one of our Gold Sponsors for the upcoming Constructing Mega Facilities Summit taking place in Houston in April. XNRGY offers large dedicated outside air systems and custom air handlers incorporating energy recovery technologies, cooling (DX), heating coils, fans, and humidification systems. Thermal break construction and special materials such as injected foam panels, aluminium and stainless steel meet the most demanding specifications.

To discuss mega facility construction and the key issues facing the industry, connect with solution providers and network with delegates, attend the Constructing Mega Facilities: Advances in Planning, Design, and Engineering Summit taking place on April 9th and 10th, 2025, in Houston, Texas.

For more information, visit our website or email us at info@innovatrix.eu for the event agenda.